![](https://linc.pusan.ac.kr/wp-content/uploads/2024/02/일반형_대상-나노메카트로닉스공학과-King-of-NANO-425x1024.webp)
일반형 대상 – 나노메카트로닉스공학과 King of NANO
주제: Growth of Tantalum Nitride Films on Si by RF Reactive Sputtering : Effect of N2/Ar Flow Ratio
일반형 대상 – 나노메카트로닉스공학과 King of NANO
주제: Growth of Tantalum Nitride Films on Si by RF Reactive Sputtering : Effect of N2/Ar Flow Ratio